Low temperature and high rate deposition of ferrite thin films by reactive sputtering method using electron cyclotron resonance

Terumitsu Tanaka, Kazunori Oshiro, Hirotaka Fujimori, Hiroki Kurisu, Yoshihiro Shimosato, Shigenobu Okada, Mitsuru Matsuura, Setsuo Yamamoto

研究成果: Contribution to journalArticle

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Engineering & Materials Science

Chemical Compounds

Physics & Astronomy