Low-Temperature Growth of Thin Silicon Nitride Film by Electron Cyclotron Resonance Plasma Irradiation

Liwei Zhao, Nam Hoai Luu, Dong Wang, Youhei Sugimoto, Ken Ichi Ikeda, Hideheru Nakashima, Hiroshi Nakashima

研究成果: Contribution to journalArticle査読

2 被引用数 (Scopus)

抄録

An amorphous silicon nitride thin film has been fabricated by electron cyclotron resonance plasma irradiation. The growth of the film is carried out by Ar/N2 mixed plasma irradiation at a low temperature of 400°C. It is found that nitrogen partial pressure decisively affects film quality. A SiN film having a structure nearest to stoichiometric construction is obtained by precisely controlling the N2 mixing ratio at 60%. This implies that the existence of Ar with a suitable partial pressure increases the nitrogen radical concentration in the Ar/N2 mixed plasma. Under optimum conditions, the as-grown SiN film shows a leakage current more than two orders of magnitude lower than that of thermally grown SiO2 having the same equivalent oxide thickness. A high-resolution transmission electron micrograph shows an atomically flat interface of the Si substrate and SiN film.

本文言語英語
ページ(範囲)L47-L49
ジャーナルJapanese Journal of Applied Physics, Part 2: Letters
43
1 A/B
DOI
出版ステータス出版済み - 1 15 2004

All Science Journal Classification (ASJC) codes

  • 工学(全般)
  • 物理学および天文学(その他)
  • 物理学および天文学(全般)

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