Magneto-FEM analysis for micro actuator using array of magnetic elements

Fujio Tsumori, Kenji Hatama, Hyungoo Kang, Toshiko Osada, Hideshi Miura

研究成果: 著書/レポートタイプへの貢献会議での発言

7 引用 (Scopus)

抄録

This paper reports a magnetic actuator using interaction between micro magnetic elements. It was already reported that the present actuator can work even if the structure was miniaturized to nano-scale. In the present work, simple fabrication process with photolithography and PDMS casting was employed to obtain beam type structures with micro array of magnetic elements on their surface. Two samples with simple grid patterns were prepared for testing. These samples had the same grid pattern but different orientation, which caused directly opposite bending deformation under the same applied magnetic field. We used magneto finite element method (FEM) to explain the behavior of the present actuators.

元の言語英語
ホスト出版物のタイトル8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
ページ845-848
ページ数4
DOI
出版物ステータス出版済み - 9 2 2013
イベント8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 - Suzhou, 中国
継続期間: 4 7 20134 10 2013

出版物シリーズ

名前8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013

その他

その他8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013
中国
Suzhou
期間4/7/134/10/13

Fingerprint

Finite Element Analysis
Magnetic Fields
Actuators
Magnetic actuators
Finite element method
Photolithography
Casting
Magnetic fields
Fabrication
Testing

All Science Journal Classification (ASJC) codes

  • Biochemistry, Genetics and Molecular Biology (miscellaneous)
  • Biotechnology

これを引用

Tsumori, F., Hatama, K., Kang, H., Osada, T., & Miura, H. (2013). Magneto-FEM analysis for micro actuator using array of magnetic elements. : 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013 (pp. 845-848). [6559857] (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013). https://doi.org/10.1109/NEMS.2013.6559857

Magneto-FEM analysis for micro actuator using array of magnetic elements. / Tsumori, Fujio; Hatama, Kenji; Kang, Hyungoo; Osada, Toshiko; Miura, Hideshi.

8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013. 2013. p. 845-848 6559857 (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013).

研究成果: 著書/レポートタイプへの貢献会議での発言

Tsumori, F, Hatama, K, Kang, H, Osada, T & Miura, H 2013, Magneto-FEM analysis for micro actuator using array of magnetic elements. : 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013., 6559857, 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013, pp. 845-848, 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013, Suzhou, 中国, 4/7/13. https://doi.org/10.1109/NEMS.2013.6559857
Tsumori F, Hatama K, Kang H, Osada T, Miura H. Magneto-FEM analysis for micro actuator using array of magnetic elements. : 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013. 2013. p. 845-848. 6559857. (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013). https://doi.org/10.1109/NEMS.2013.6559857
Tsumori, Fujio ; Hatama, Kenji ; Kang, Hyungoo ; Osada, Toshiko ; Miura, Hideshi. / Magneto-FEM analysis for micro actuator using array of magnetic elements. 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013. 2013. pp. 845-848 (8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013).
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