Main-discharge formation and light emission in pure Ar gas at multi-atmospheric pressure using the automatically pre-ionized plasma electrode

S. K. Hong, Nobuya Hayashi, S. Ihara, S. Satoh, C. Yamabe

研究成果: ジャーナルへの寄稿学術誌査読

抄録

For the investigation of the possibility of the discharge-pumped Ar2* excimer laser action, characteristics of the discharge and the light emission in multi-atmospheric (1-5 atm) pure Ar gas have been investigated using the API (automatically pre-ionized) plasma electrode. It was demonstrated that the uniform pre-ionization forms the uniform main-discharge by the control effect of capacitance Cpr and the maximum energy deposition was increased. The light emission characteristics were investigated by Ar atomic line and Ar ionic line. The intensity of the Ar ionic line at 427.8 nm increased proportionally to the approximate cubic of the Ar gas pressure but that of Ar atomic line at 696.9 nm saturated at pressure above 4 atm.

本文言語英語
ページ(範囲)25-36
ページ数12
ジャーナルVacuum
79
1-2
DOI
出版ステータス出版済み - 7月 8 2005
外部発表はい

!!!All Science Journal Classification (ASJC) codes

  • 表面、皮膜および薄膜
  • 凝縮系物理学
  • 表面および界面

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