Maskless gray scale lithography and its 3D microfluidic applications

Yoko Yamanishi, Takuma Nakano, Yu Sawada, Kazuyoshi Itoga, Teruo Okano, Fumihito Arai

研究成果: ジャーナルへの寄稿記事

1 引用 (Scopus)

抄録

This paper presents the novel three-dimensional fabrication using maskless exposure equipment and threedimensional (3D) microfluidic cell manipulation uses grayscale data to directly control the exposed photoresist height without using a mask. The 3D microchannel and microvalve were fabricated simply using lowcost exposure and height ranging from 0 to 200 μm. The 3D microvalve prevents liquid leakage when the membrane is closed - difficult to do using conventional 2D photolithography. We removed the oocyte zona pellucida passing through the 3D microchannel whose cross-section is gradually restricted along the path to provide mechanical stimulation omnidirectionally on the oocyte surface. The microfluidic chip may contribute to make high peeled-oocyte throughput effective without damaging the oocytes.

元の言語英語
ページ(範囲)426-433
ページ数8
ジャーナルJournal of Robotics and Mechatronics
23
発行部数3
DOI
出版物ステータス出版済み - 1 1 2011
外部発表Yes

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Microchannels
Microfluidics
Lithography
Leakage (fluid)
Photolithography
Photoresists
Masks
Throughput
Membranes
Fabrication
Liquids

All Science Journal Classification (ASJC) codes

  • Computer Science(all)
  • Electrical and Electronic Engineering

これを引用

Maskless gray scale lithography and its 3D microfluidic applications. / Yamanishi, Yoko; Nakano, Takuma; Sawada, Yu; Itoga, Kazuyoshi; Okano, Teruo; Arai, Fumihito.

:: Journal of Robotics and Mechatronics, 巻 23, 番号 3, 01.01.2011, p. 426-433.

研究成果: ジャーナルへの寄稿記事

Yamanishi, Yoko ; Nakano, Takuma ; Sawada, Yu ; Itoga, Kazuyoshi ; Okano, Teruo ; Arai, Fumihito. / Maskless gray scale lithography and its 3D microfluidic applications. :: Journal of Robotics and Mechatronics. 2011 ; 巻 23, 番号 3. pp. 426-433.
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