Measurement of Axial Position of a Microsphere Using Chromatic Confocal System for Probe System Based on the Laser Trapping with the Standing Wave Scale

Shin Ichi Ueda, Masaki Michihata, Terutake Hayashi, Yasuhiro Takaya

研究成果: 書籍/レポート タイプへの寄稿会議への寄与

抄録

We have proposed surface scanning measurement based on the laser trapping based probe with the standing wave scale (SWS). A scale resolution of SWS is subject to the wavelength of laser and of the hundred nm order, so the interpolation of the SWS is required. The microsphere used for probe, which is the sensor to read the SWS, is located where the forces by the laser trapping and by the standing wave field are balanced, so that the microsphere position depends on the displacement of the sample. For the interpolation of the SWS, axial position of the microsphere must be measured with high accuracy and high resolution. In this report, chromatic confocal system is proposed. As a result the measuring range and the resolution are achieved 5 μm and 10 nm, respectively.

本文言語英語
ホスト出版物のタイトル2014 International Symposium on Optomechatronic Technologies, ISOT 2014
出版社Institute of Electrical and Electronics Engineers Inc.
ページ223-227
ページ数5
ISBN(電子版)9781467367523
DOI
出版ステータス出版済み - 2014
イベント2014 International Symposium on Optomechatronic Technologies, ISOT 2014 - Seattle, 米国
継続期間: 11月 5 201411月 7 2014

出版物シリーズ

名前2014 International Symposium on Optomechatronic Technologies, ISOT 2014

その他

その他2014 International Symposium on Optomechatronic Technologies, ISOT 2014
国/地域米国
CitySeattle
Period11/5/1411/7/14

!!!All Science Journal Classification (ASJC) codes

  • 機械工学
  • 電子工学および電気工学

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