@inproceedings{a1458dba388c4c598dcc48833d29417f,
title = "Measurement of electron energy distribution obtained from wedge type silicon emitter array",
author = "Katsuya Higa and Akiyoshi Baba and Tanemasa Asano",
year = "2004",
doi = "10.1109/imnc.2004.245640",
language = "English",
isbn = "4990247205",
series = "Digest of Papers - Microprocesses and Nanotechnology 2004",
publisher = "The Japan Society of Applied Physics",
pages = "258--259",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2004",
note = "2004 International Microprocesses and Nanotechnology Conference ; Conference date: 26-10-2004 Through 29-10-2004",
}