Measurement of preferential sputtering of iron-oxides using laser fluorescence spectroscopy

Yoshinobu Matsuda, Kouji Yamaguchi, Kiyoyuki Suenaga, Yukihiko Yamagata, Chikahisa Honda, Mitsuo Maeda, Yasunori Yamamura, Katsunori Yamamura, Masanori Akazaki

研究成果: ジャーナルへの寄稿記事

3 引用 (Scopus)

抄録

Laser fluorescence spectroscopy was used to obtain the velocity-distribution function of sputtered iron from iron oxides, and the fitting of the obtained profiles with the Thompson formula yielded the preferential sputtering of oxygen from iron oxides quantitatively.

元の言語英語
ページ(範囲)L2022-L2024
ジャーナルJapanese Journal of Applied Physics
27
発行部数11 A
DOI
出版物ステータス出版済み - 1988

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Laser spectroscopy
Fluorescence spectroscopy
Iron oxides
iron oxides
Sputtering
sputtering
fluorescence
Velocity distribution
spectroscopy
lasers
Distribution functions
velocity distribution
distribution functions
Iron
iron
Oxygen
oxygen
profiles

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

これを引用

Measurement of preferential sputtering of iron-oxides using laser fluorescence spectroscopy. / Matsuda, Yoshinobu; Yamaguchi, Kouji; Suenaga, Kiyoyuki; Yamagata, Yukihiko; Honda, Chikahisa; Maeda, Mitsuo; Yamamura, Yasunori; Yamamura, Katsunori; Akazaki, Masanori.

:: Japanese Journal of Applied Physics, 巻 27, 番号 11 A, 1988, p. L2022-L2024.

研究成果: ジャーナルへの寄稿記事

Matsuda, Y, Yamaguchi, K, Suenaga, K, Yamagata, Y, Honda, C, Maeda, M, Yamamura, Y, Yamamura, K & Akazaki, M 1988, 'Measurement of preferential sputtering of iron-oxides using laser fluorescence spectroscopy', Japanese Journal of Applied Physics, 巻. 27, 番号 11 A, pp. L2022-L2024. https://doi.org/10.1143/JJAP.27.L2022
Matsuda, Yoshinobu ; Yamaguchi, Kouji ; Suenaga, Kiyoyuki ; Yamagata, Yukihiko ; Honda, Chikahisa ; Maeda, Mitsuo ; Yamamura, Yasunori ; Yamamura, Katsunori ; Akazaki, Masanori. / Measurement of preferential sputtering of iron-oxides using laser fluorescence spectroscopy. :: Japanese Journal of Applied Physics. 1988 ; 巻 27, 番号 11 A. pp. L2022-L2024.
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abstract = "Laser fluorescence spectroscopy was used to obtain the velocity-distribution function of sputtered iron from iron oxides, and the fitting of the obtained profiles with the Thompson formula yielded the preferential sputtering of oxygen from iron oxides quantitatively.",
author = "Yoshinobu Matsuda and Kouji Yamaguchi and Kiyoyuki Suenaga and Yukihiko Yamagata and Chikahisa Honda and Mitsuo Maeda and Yasunori Yamamura and Katsunori Yamamura and Masanori Akazaki",
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T1 - Measurement of preferential sputtering of iron-oxides using laser fluorescence spectroscopy

AU - Matsuda, Yoshinobu

AU - Yamaguchi, Kouji

AU - Suenaga, Kiyoyuki

AU - Yamagata, Yukihiko

AU - Honda, Chikahisa

AU - Maeda, Mitsuo

AU - Yamamura, Yasunori

AU - Yamamura, Katsunori

AU - Akazaki, Masanori

PY - 1988

Y1 - 1988

N2 - Laser fluorescence spectroscopy was used to obtain the velocity-distribution function of sputtered iron from iron oxides, and the fitting of the obtained profiles with the Thompson formula yielded the preferential sputtering of oxygen from iron oxides quantitatively.

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DO - 10.1143/JJAP.27.L2022

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JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

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