Measurement of probe-stylus sphere diameter for micro-CMM based on spectral fingerprint of whispering gallery modes

Masaki Michihata, Terutake Hayashi, Atsushi Adachi, Yasuhiro Takaya

研究成果: ジャーナルへの寄稿記事

11 引用 (Scopus)

抄録

Probe calibration contributes to the measurement uncertainty of micro-coordinate measuring machines (micro-CMMs). This study proposes a new method of measuring stylus sphere diameters for micro-CMMs based on the analysis of whispering gallery modes (WGMs). Depending on the incident wavelength, different WGMs will be excited in the probe stylus, resulting in a wavelength spectral fingerprint that is related to the sphere diameter. In this paper, the diameter of the microprobe stylus sphere was determined with a least-squares method using theoretical and measured spectra of WGMs. The measurement results showed that the precision of the proposed method was ±1 nm.

元の言語英語
ページ(範囲)469-472
ページ数4
ジャーナルCIRP Annals - Manufacturing Technology
63
発行部数1
DOI
出版物ステータス出版済み - 1 1 2014
外部発表Yes

Fingerprint

Whispering gallery modes
Coordinate measuring machines
Wavelength
Calibration

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Industrial and Manufacturing Engineering

これを引用

Measurement of probe-stylus sphere diameter for micro-CMM based on spectral fingerprint of whispering gallery modes. / Michihata, Masaki; Hayashi, Terutake; Adachi, Atsushi; Takaya, Yasuhiro.

:: CIRP Annals - Manufacturing Technology, 巻 63, 番号 1, 01.01.2014, p. 469-472.

研究成果: ジャーナルへの寄稿記事

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