Measurements of SiH4/H2 VHF plasma parameters with heated langmuir probe

T. Yamane, S. Nakao, Y. Takeuchi, H. Muta, R. Ichiki, K. Uchino, Y. Kawai

研究成果: ジャーナルへの寄稿記事

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The parameters of a SiH4/H2 VHF plasma were measured as a function of silane gas concentration with a heated Langmuir probe. It was found that when the sailane gas concentration is increased, the nagative ion density increases. Here the negative ion density was estimated from the reduction of the electron saturation current. In addition, the dependence of the wall potential on the silane gas concentration agreed with the theoretical values derived from the Bohm sheath equation including negative ions.

元の言語英語
ページ(範囲)588-591
ページ数4
ジャーナルContributions to Plasma Physics
53
発行部数8
DOI
出版物ステータス出版済み - 9 1 2013

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All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics

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