Mechanisms of heat and oxygen transfer in silicon melt in an electromagnetic Czochralski system

Koichi Kakimoto, Akimasa Tashiro, Takashige Shinozaki, Hideo Ishii, Yoshio Hashimoto

研究成果: Contribution to journalArticle査読

20 被引用数 (Scopus)

抄録

The three-dimensional time-dependent flow of silicon melt in an electromagnetic Czochralski system was numerically investigated. Two different types of electrodes were used in the mathematical modeling to determine the mechanisms of heat and oxygen transfer in the melt. The results showed that electromagnetic force in the azimuthal direction suppressed natural convection due to centrifugal force. It was also shown that heat and oxygen transfer from a crucible wall to the solid-liquid interface was enhanced due to off-centered vortices.

本文言語英語
ページ(範囲)55-65
ページ数11
ジャーナルJournal of Crystal Growth
243
1
DOI
出版ステータス出版済み - 2002

All Science Journal Classification (ASJC) codes

  • 凝縮系物理学
  • 無機化学
  • 材料化学

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