MEMS-based X-ray optics for astronomy, planetary exploration, and earth observation

Yuichiro Ezoe, Tomohiro Ogawa, Masahiro Ikuta, Mayu Sato, Kazuhisa Mitsuda, Hitomi Yamaguchi, Yoshiaki Kanamori, Kohei Morishita, Kazuo Nakajima, Hiroshi Hiroshima, Ryutaro Maeda

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

1 被引用数 (Scopus)

抄録

We have been developing novel ultra lightweight X-ray optics based on MEMS technologies, aiming at future space missions whose objectives include X-ray astronomy, planetary exploration, and Earth observation. Sidewalls of DRIE- micro pores through thin silicon wafers are used for X-ray mirrors. Recently, we built a prototype of a 4-inch Wolter type-I optic and fabricated a 12-inch single-stage op-tic. In this paper, we review our development and future space applications.

本文言語英語
ホスト出版物のタイトル2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Proceedings
出版社IEEE Computer Society
ページ127-128
ページ数2
ISBN(電子版)9780992841423
DOI
出版ステータス出版済み - 10 14 2014
外部発表はい
イベント2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014 - Glasgow, 英国
継続期間: 8 17 20148 21 2014

出版物シリーズ

名前International Conference on Optical MEMS and Nanophotonics
ISSN(印刷版)2160-5033
ISSN(電子版)2160-5041

その他

その他2014 International Conference on Optical MEMS and Nanophotonics, OMN 2014
Country英国
CityGlasgow
Period8/17/148/21/14

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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