MEMS-based X-ray optics for future astronomical missions

Yuichiro Ezoe, Ikuyuki Mitsuishi, Kensuke Ishizu, Teppei Moriyama, Kazuhisa Mitsuda, Noriko Y. Yamasaki, Takaya Ohashi, Mitsuhiro Horade, Susumu Sugiyama, Raul E. Riveros, Taylor Boggs, Hitomi Yamaguchi, Yoshiaki Kanamori, Nicholas T. Gabriel, Joseph J. Talghader, Kohei Morishita, Kazuo Nakajima, Ryutaro Maeda

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

X-ray optics based on MEMS technologies can provide future astronomical missions with ultra light-weight and high-performance optical systems. Curvilinear micropores vertical to a thin wafer are made by using DRIE (Deep Reactive Ion Etching) or X-ray LIGA. The side walls are smoothed by using magnetic field assisted finishing and annealing technologies in order that the walls can reflect X-rays. Two or four such wafers are bent to spherical shapes with different curvature of radii and stacked, to focus parallel X-rays from astronomical objects by multiple reflections. In this paper, the concept and recent advances of the MEMS X-ray optics are reviewed.

本文言語英語
ホスト出版物のタイトル2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
ページ191-192
ページ数2
DOI
出版ステータス出版済み - 2010
外部発表はい
イベント2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010 - Sapporo, 日本
継続期間: 8 9 20108 12 2010

出版物シリーズ

名前2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010

その他

その他2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics 2010
Country日本
CitySapporo
Period8/9/108/12/10

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Electrical and Electronic Engineering

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