抄録
The effect of field irregularity due to the use of conducting meshes to cover holes of a lower electrode in a parallel-plate electrostatic analyzer, is experimentally and numerically investigated. Displacement of a focal point and degradation of analyzer characteristics are found in the experiment. Dependence of analyzer characteristics on wire spacing is obtained. Primary results are also confirmed by numerical analysis. Criteria for error estimation are theoretically derived and found to be consistent with the experiment.
本文言語 | 英語 |
---|---|
ページ(範囲) | 1606-1612 |
ページ数 | 7 |
ジャーナル | Review of Scientific Instruments |
巻 | 65 |
号 | 5 |
DOI | |
出版ステータス | 出版済み - 12月 1 1994 |
外部発表 | はい |
!!!All Science Journal Classification (ASJC) codes
- 器械工学