In the usual DLTS technique, the trap activation energy is obtained from Arrhenius plots of the inverse of time constants set up experimentally vs the inverse peak temperatures of the DLTS signals. Considerable error, however, may appear in the activation energy when DLTS singals with a hump or shoulder are observed. In a special case, a single-peak DLTS is obtained when the signals due to two or more individual traps overlap. However, it is possible in this case to separate each deep-trap response from the overlapping DLTS signal by observing the injection pulse width dependence of the transient capacitance, and to determine the trap parameters such as the activation energy correctly. This paper presents a method for determining the trap parameters from the injection pulse width dependence of the DLTS spectrum.
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