Micro-fabrication and characterization methods for dimensionally-controlled polymeric materils

Atsushi Takahara, Shigekazu Yasutake, Masamichi Morita, Tomoyuki Koga, Jun Fukai

研究成果: Contribution to journalReview article査読

抄録

The authors have proposed herein a novel micro-fabrication method of polymer ultrathin films with a combination of the fluoroalkylsilane monolayer patterned substrates and ink-jet (IJ) method. The purpose of this study is to establish the fundamental technique of site-selective formation of polymer thin film utilizing wetting contrast of patterned fluoroalkylsilane monolayer (R f)/silanol (Si-OH) surface. Rf/Si-OH patterned surface prepared by the VUV-rays lithography have lyophobic Rf and lyophilic Si-OH phases, respectively. Polystyrene/xylene solution was coated on the patterned surface with wetting contrast by the ink-jet method. The patterned polystyrene ultrathin films were selectively formed on lyophilic areas. Thses patterned monolayer and polymer ultrathin films were characterized by novel characterization techniques such as temperature dependent lateral force microscopy, FE-SEM, Enviromental-SEM, and imaging XPS.

本文言語英語
ページ(範囲)4283-4285
ページ数3
ジャーナルPolymer Preprints, Japan
54
2
出版ステータス出版済み - 12 1 2005
イベント54th SPSJ Symposium on Macromolecules - Yamagata, 日本
継続期間: 9 20 20059 22 2005

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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