Micro-probing system for coordinate metrology using a particle controlled by optical radiation pressure based on standing wave scale sensing method

Yasuhiro Takaya, Masaki Michihata, Terutake Hayashi

研究成果: 書籍/レポート タイプへの寄稿会議への寄与

1 被引用数 (Scopus)

抄録

Currently, micro-components are required to fabricate with great precision owing to the miniaturization of complex product. In order to assess the dimension, size, and other geometric quantities of such complex micro-components, technological progress is needed in micro- and nano-coordinate metrology. Therefore, the coordinate metrology have been attempted thus far. To establish nano-coordinate metrology with a microprobe technique, we have been developing the optically trapped probe, whose principle is based on the single-beam gradient-force optical trap of a particle in air. However, the rapidly increasing complexity including micro-fine figures makes it difficult to evaluate geometric quantities using a microprobe that can barely access a concave surface. An improved microprobe is required to have a better long working distance, wide measurement range, and high resolution. In this paper, a novel probing technique for coordinate metrology is discussed. The proposed method is based on optical interference, which is seen as a standing wave pattern, also called a standing wave scale. The feasibility is examined by the profile measurement of a smooth surface with high accuracy and the dimensional measurement of a trench structure.

本文言語英語
ホスト出版物のタイトルInternational Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013
8769
DOI
出版ステータス出版済み - 8月 15 2013
外部発表はい
イベントInternational Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013 - Singapore, シンガポール
継続期間: 4月 9 20134月 11 2013

その他

その他International Conference on Optics in Precision Engineering and Nanotechnology, icOPEN 2013
国/地域シンガポール
CitySingapore
Period4/9/134/11/13

!!!All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学

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