Micro-refrigerator fabricated on silicon wafer

Y. Takata, K. Sugahara, T. Tachikawa, S. Moroe, H. Kubota, M. Kohno, K. Takahashi, T. Koshimizu

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

A prototype Joule-Thomson micro-cooler was fabricated on silicon wafer by making use of photofabrication. The microcooler uses ethylene as a refrigerant and it consists mainly of heat exchanger and evaporator. The cooling power of 20mW at evaporator temperature of 272K was attained at the inlet and outlet gas pressures of 2.5MPa and 0.1MPa, respectively. To understand the low cooling performance, numerical analysis of heat exchanger has been done and the effects of mass flow rate and thermal conductivity of solid on temperature profiles and effectiveness were examined. It was found that the flow rate of present experiment is too large and the decrease in flow rate gives better temperature effectiveness of heat exchanger. It was also found that the low thermal conductivity of solid improves the performance of heat exchanger.

元の言語英語
ホスト出版物のタイトルProceedings of the 5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007
ページ749-754
ページ数6
DOI
出版物ステータス出版済み - 12 21 2007
イベント5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007 - Puebla, メキシコ
継続期間: 6 18 20076 20 2007

出版物シリーズ

名前Proceedings of the 5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007

その他

その他5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007
メキシコ
Puebla
期間6/18/076/20/07

Fingerprint

Refrigerators
refrigerators
heat exchangers
Silicon wafers
Heat exchangers
Thermal conductivity of solids
wafers
evaporators
Flow rate
silicon
Evaporators
thermal conductivity
flow velocity
Cooling
cooling
refrigerants
mass flow rate
Refrigerants
outlets
coolers

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Physics and Astronomy(all)

これを引用

Takata, Y., Sugahara, K., Tachikawa, T., Moroe, S., Kubota, H., Kohno, M., ... Koshimizu, T. (2007). Micro-refrigerator fabricated on silicon wafer. : Proceedings of the 5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007 (pp. 749-754). (Proceedings of the 5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007). https://doi.org/10.1115/ICNMM2007-30108

Micro-refrigerator fabricated on silicon wafer. / Takata, Y.; Sugahara, K.; Tachikawa, T.; Moroe, S.; Kubota, H.; Kohno, M.; Takahashi, K.; Koshimizu, T.

Proceedings of the 5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007. 2007. p. 749-754 (Proceedings of the 5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007).

研究成果: 著書/レポートタイプへの貢献会議での発言

Takata, Y, Sugahara, K, Tachikawa, T, Moroe, S, Kubota, H, Kohno, M, Takahashi, K & Koshimizu, T 2007, Micro-refrigerator fabricated on silicon wafer. : Proceedings of the 5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007. Proceedings of the 5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007, pp. 749-754, 5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007, Puebla, メキシコ, 6/18/07. https://doi.org/10.1115/ICNMM2007-30108
Takata Y, Sugahara K, Tachikawa T, Moroe S, Kubota H, Kohno M その他. Micro-refrigerator fabricated on silicon wafer. : Proceedings of the 5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007. 2007. p. 749-754. (Proceedings of the 5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007). https://doi.org/10.1115/ICNMM2007-30108
Takata, Y. ; Sugahara, K. ; Tachikawa, T. ; Moroe, S. ; Kubota, H. ; Kohno, M. ; Takahashi, K. ; Koshimizu, T. / Micro-refrigerator fabricated on silicon wafer. Proceedings of the 5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007. 2007. pp. 749-754 (Proceedings of the 5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007).
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AU - Takata, Y.

AU - Sugahara, K.

AU - Tachikawa, T.

AU - Moroe, S.

AU - Kubota, H.

AU - Kohno, M.

AU - Takahashi, K.

AU - Koshimizu, T.

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Y1 - 2007/12/21

N2 - A prototype Joule-Thomson micro-cooler was fabricated on silicon wafer by making use of photofabrication. The microcooler uses ethylene as a refrigerant and it consists mainly of heat exchanger and evaporator. The cooling power of 20mW at evaporator temperature of 272K was attained at the inlet and outlet gas pressures of 2.5MPa and 0.1MPa, respectively. To understand the low cooling performance, numerical analysis of heat exchanger has been done and the effects of mass flow rate and thermal conductivity of solid on temperature profiles and effectiveness were examined. It was found that the flow rate of present experiment is too large and the decrease in flow rate gives better temperature effectiveness of heat exchanger. It was also found that the low thermal conductivity of solid improves the performance of heat exchanger.

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