Micro-refrigerator fabricated on silicon wafer

Y. Takata, K. Sugahara, T. Tachikawa, S. Moroe, H. Kubota, M. Kohno, K. Takahashi, T. Koshimizu

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

A prototype Joule-Thomson micro-cooler was fabricated on silicon wafer by making use of photofabrication. The microcooler uses ethylene as a refrigerant and it consists mainly of heat exchanger and evaporator. The cooling power of 20mW at evaporator temperature of 272K was attained at the inlet and outlet gas pressures of 2.5MPa and 0.1MPa, respectively. To understand the low cooling performance, numerical analysis of heat exchanger has been done and the effects of mass flow rate and thermal conductivity of solid on temperature profiles and effectiveness were examined. It was found that the flow rate of present experiment is too large and the decrease in flow rate gives better temperature effectiveness of heat exchanger. It was also found that the low thermal conductivity of solid improves the performance of heat exchanger.

本文言語英語
ホスト出版物のタイトルProceedings of the 5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007
ページ749-754
ページ数6
DOI
出版ステータス出版済み - 12 21 2007
イベント5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007 - Puebla, メキシコ
継続期間: 6 18 20076 20 2007

出版物シリーズ

名前Proceedings of the 5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007

その他

その他5th International Conference on Nanochannels, Microchannels and Minichannels, ICNMM2007
Countryメキシコ
CityPuebla
Period6/18/076/20/07

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Physics and Astronomy(all)

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