Micro tactile sensor with capacitive-inductive function for discrimination of object property

Katsunori Shida, Ryo Sato, Katsuya Higa, Tanemasa Asano

研究成果: ジャーナルへの寄稿Conference article

1 引用 (Scopus)

抄録

We have developed multi-sensing artificial touch devices for the recognition of object properties and its surface situation. In this paper we present the fabrication of a thin-plate micro tactile sensor with two sensing functions of capacitance and inductance, and introduce the results of comparison of characteristics among various types of micro sensors for four typical test objects. The characteristics of sensor distinctly depend on each size of the sensors, the material of electrodes, and the depth of insulating layer in the sensor. Furthermore, by preparing the shielding layer in the sensor in the way of the fabrication process, it was found that the problem which occurred in miniaturizing the sensor would be solved.

元の言語英語
ページ(範囲)312-321
ページ数10
ジャーナルProceedings of SPIE - The International Society for Optical Engineering
3891
出版物ステータス出版済み - 12 1 1999
外部発表Yes
イベントProceedings of the 1999 Electronics and Structures for MEMS - Royal Pines Resort, Aust
継続期間: 10 27 199910 29 1999

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Tactile Sensor
Discrimination
discrimination
Sensor
sensors
Sensors
Fabrication
Sensing
fabrication
touch
Inductance
thin plates
Thin Plate
Capacitance
inductance
Electrode
shielding
Object
Shielding
capacitance

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

これを引用

Micro tactile sensor with capacitive-inductive function for discrimination of object property. / Shida, Katsunori; Sato, Ryo; Higa, Katsuya; Asano, Tanemasa.

:: Proceedings of SPIE - The International Society for Optical Engineering, 巻 3891, 01.12.1999, p. 312-321.

研究成果: ジャーナルへの寄稿Conference article

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