Microcalorimeter-type energy dispersive X-ray spectrometer for a transmission electron microscope

Toru Hara, Keiichi Tanaka, Keisuke Maehata, Kazuhisa Mitsuda, Noriko Y. Yamasaki, Mitsuaki Ohsaki, Katsuaki Watanabe, Xiuzhen Yu, Takuji Ito, Yoshihiro Yamanaka

研究成果: ジャーナルへの寄稿学術誌査読

28 被引用数 (Scopus)

抄録

A new energy dispersive X-ray spectrometer (EDS) with a mi- crocalorimeter detector equipped with a transmission electron microscope (TEM) has been developed for high- accuracy compositional analysis in the nanoscale. A superconducting transition-edge-sensor-type microcalorimeter is applied as the detector. A cryogen-free cooling system, which consists of a mechanical and a dilution refrigerator, is selected to achieve long-term temperature stability. In order to mount these detector and refrigerators on a TEM, the cooling system is specially designed such that these two refrigerators are separated. Also, the detector position and arrangement are carefully designed to avoid adverse affects between the superconductor detector and the TEM lens system. Using the developed EDS system, at present, an energy resolution of 21.92 eV full-width-at-half maximum has been achieved at the Cr Kα line. This value is about seven times better than that of the current typical commercial Si(Li) detector, which is usually around 140 eV. The developed microcalorimeter EDS system can measure a wide energy range, 1-20 keV, at one time with this high energy resolution that can resolve peaks from most of the elements. Although several further developments will be needed to enable practical use, highly accurate compositional analysis with high energy resolution will be realized by this microcalorimeter EDS system.

本文言語英語
ページ(範囲)17-26
ページ数10
ジャーナルJournal of Electron Microscopy
59
1
DOI
出版ステータス出版済み - 2月 2010

!!!All Science Journal Classification (ASJC) codes

  • 器械工学

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