Microfabrication of wide-measurement-range load sensor using quartz crystal resonator

Yuichi Murozaki, Shinya Sakuma, Fumihito Arai

研究成果: Contribution to journalConference article査読

4 被引用数 (Scopus)

抄録

We successfully established a wafer level fabrication process of the quartz crystal resonator (QCR) load sensor using atomic diffusion bonding. The proposed sensor has three-layer structures; two Si-hold layers and a quartz layer. Using microfabrication and atomic diffusion bonding, the assembly process was simplified. The fabrication process enables further miniaturization of the QCR sensor due to the simplified assembling method. The fabricated sensor is easily integrated in the outer package and can be designed the measurement range. Finally, we succeeded in multi-biosignals (heartbeat, body motion) detection using fabricated QCR sensor and the outer case.

本文言語英語
論文番号7051088
ページ(範囲)833-836
ページ数4
ジャーナルProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
2015-February
February
DOI
出版ステータス出版済み - 2 26 2015
外部発表はい
イベント2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, ポルトガル
継続期間: 1 18 20151 22 2015

All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • 機械工学
  • 電子工学および電気工学

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