Microlens Fabricated by the Planar Process

Jun Ichi Shimada, Osamu Ohguchi, Renshi Sawada

    研究成果: Contribution to journalArticle査読

    24 被引用数 (Scopus)

    抄録

    A novel microlens is proposed that can be integrated on a laser-diode substrate by the planar process. A horizontal focusing lens, which is one component of this microlens, with a nearly diffraction-limited focusing spot is successfully fabricated. The relationship between fabrication errors and lens characteristics is quantitatively established by comparing lenses with various fabrication errors. Also, a laser diode integrated with the horizontal focusing lens is successfully fabricated without damage.

    本文言語英語
    ページ(範囲)571-576
    ページ数6
    ジャーナルJournal of Lightwave Technology
    9
    5
    DOI
    出版ステータス出版済み - 5 1991

    All Science Journal Classification (ASJC) codes

    • Atomic and Molecular Physics, and Optics

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