Micromachining of polydimethylsiloxane using EUV light

Shintaron Fukami, Shuichi Torii, Tetsuya Makimura, Kota Okazaki, Daisuke Nakamura, Akihiko Takahashi, Tatsuo Okada, Hiroyuki Niino, Koichi Murakami

研究成果: 著書/レポートタイプへの貢献会議での発言

抄録

We studied the method to fabricate microstructures in PDMS sheet using laser-generated EUV light. In the high power density EUV light irradiation region, PDMS can be machined without chemical modification.

元の言語英語
ホスト出版物のタイトル2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
DOI
出版物ステータス出版済み - 10 18 2013
イベント10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 - Kyoto, 日本
継続期間: 6 30 20137 4 2013

出版物シリーズ

名前Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

その他

その他10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
日本
Kyoto
期間6/30/137/4/13

Fingerprint

Micromachining
Polydimethylsiloxane
micromachining
Chemical modification
radiant flux density
Irradiation
microstructure
Microstructure
irradiation
Lasers
lasers
baysilon

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

これを引用

Fukami, S., Torii, S., Makimura, T., Okazaki, K., Nakamura, D., Takahashi, A., ... Murakami, K. (2013). Micromachining of polydimethylsiloxane using EUV light. : 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 [6600551] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2013.6600551

Micromachining of polydimethylsiloxane using EUV light. / Fukami, Shintaron; Torii, Shuichi; Makimura, Tetsuya; Okazaki, Kota; Nakamura, Daisuke; Takahashi, Akihiko; Okada, Tatsuo; Niino, Hiroyuki; Murakami, Koichi.

2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 2013. 6600551 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

研究成果: 著書/レポートタイプへの貢献会議での発言

Fukami, S, Torii, S, Makimura, T, Okazaki, K, Nakamura, D, Takahashi, A, Okada, T, Niino, H & Murakami, K 2013, Micromachining of polydimethylsiloxane using EUV light. : 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013., 6600551, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013, Kyoto, 日本, 6/30/13. https://doi.org/10.1109/CLEOPR.2013.6600551
Fukami S, Torii S, Makimura T, Okazaki K, Nakamura D, Takahashi A その他. Micromachining of polydimethylsiloxane using EUV light. : 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 2013. 6600551. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2013.6600551
Fukami, Shintaron ; Torii, Shuichi ; Makimura, Tetsuya ; Okazaki, Kota ; Nakamura, Daisuke ; Takahashi, Akihiko ; Okada, Tatsuo ; Niino, Hiroyuki ; Murakami, Koichi. / Micromachining of polydimethylsiloxane using EUV light. 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 2013. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).
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