Microstructure analysis of β-FeSi2 grown on Ag-coated Si(001) substrate

Shunichi Motomura, Kohei Hayashi, Masaru Itakura, Kensuke Akiyama

研究成果: Contribution to journalArticle査読

3 被引用数 (Scopus)

抄録

Microstructure of epitaxial β-FeSi2 crystalline film grown on Ag-coated Si (001) substrate was investigated with scanning electron microscope (SEM) and transmission electron microscopes (TEMs). It was found that the film consists of two types of β-FeSi2 grains, or rod-like polygonal and thin platelet grains. The platelet grains are connected mutually to form large continuous-film areas on the Si(001) substrate. The crystallographic orientation relationship obtained is: β-FeSi2(100)[011]//Si(001)[110], which is a rare epitaxial relationship. However, the interface between the platelet grains and the Si substrate is very flat at an atomic level. Moreover, remains of Ag impurities are not detected in the β-FeSi2 grains. These results indicate that the continuous crystalline film consisting of high quality β-FeSi2 crystals can be produced by using Ag-coated Si(001) substrate.

本文言語英語
ページ(範囲)1815-1818
ページ数4
ジャーナルPhysica Status Solidi (C) Current Topics in Solid State Physics
10
12
DOI
出版ステータス出版済み - 12 2013

All Science Journal Classification (ASJC) codes

  • 凝縮系物理学

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