Microstructure and nanomechanical properties of amorphous carbon thin films prepared by pulsed laser deposition in various atmospheres

Q. Wei, S. Yamolenko, J. Sankar, A. K. Sharma, Y. Yamagata, J. Narayan

研究成果: Contribution to journalArticle査読

抄録

We have investigated the effect of chamber pressure and atmosphere on the microstructure and nanomechanical properties of amorphous diamondlike carbon (DLC) thin films prepared by pulsed laser deposition. The amorphous carbon films were deposited in various atmospheres such as nitrogen and argon at different pressures. We used Raman spectroscopy and optical microscopy to study the bonding characteristics and microstructures of the DLC films. Nanoindentation measurements were carried out on various samples prepared under different conditions to study the effect of chamber pressure and atmosphere on the elastic modulus and nano-hardness of the films. It was found that reduced vacuum leads to softer amorphous carbon films. Amorphous carbon films prepared in higher pressures exhibit increased density of particulates, and significantly rough surface. The results were understood in terms of thermalization of the laser plasma due to increased possibility of collision.

本文言語英語
ページ(範囲)217-222
ページ数6
ジャーナルMaterials Research Society Symposium - Proceedings
616
DOI
出版ステータス出版済み - 2000
外部発表はい

All Science Journal Classification (ASJC) codes

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学

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