Microstructure and nanomechanical properties of amorphous carbon thin films prepared by pulsed laser deposition in various atmospheres

Q. Wei, S. Yamolenko, J. Sankar, A. K. Sharma, Y. Yamagata, J. Narayan

研究成果: ジャーナルへの寄稿記事

抜粋

We have investigated the effect of chamber pressure and atmosphere on the microstructure and nanomechanical properties of amorphous diamondlike carbon (DLC) thin films prepared by pulsed laser deposition. The amorphous carbon films were deposited in various atmospheres such as nitrogen and argon at different pressures. We used Raman spectroscopy and optical microscopy to study the bonding characteristics and microstructures of the DLC films. Nanoindentation measurements were carried out on various samples prepared under different conditions to study the effect of chamber pressure and atmosphere on the elastic modulus and nano-hardness of the films. It was found that reduced vacuum leads to softer amorphous carbon films. Amorphous carbon films prepared in higher pressures exhibit increased density of particulates, and significantly rough surface. The results were understood in terms of thermalization of the laser plasma due to increased possibility of collision.

元の言語英語
ページ(範囲)217-222
ページ数6
ジャーナルMaterials Research Society Symposium - Proceedings
616
DOI
出版物ステータス出版済み - 1 1 2000
外部発表Yes

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All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering

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