Microstructure evolution of YBCO films deposited by advanced TFA-MOD process

J. Matsuda, K. Nakaoka, T. Izumi, Y. Yamada, Y. Shiohara

研究成果: Contribution to journalArticle査読

11 被引用数 (Scopus)

抄録

We have investigated microstructure evolution of YBa2Cu3O7-y (YBCO) films through the two steps of heat-treatments in the advanced TFA-MOD process, by means of transmission electron microscopy. In the calcination process, precursor films including nanopores are formed with shrinkage of the film after a remarkable increase of the thickness caused by gas generation due to thermal decomposition of metalorganic salts in the starting solution. During the crystallization process, the densification and shrinkage of the film occurs after agglomeration of nanopores and unreacted phase particles such as Y2Cu2O5, CuO and Ba-O-F in the precursor films. Before starting of YBCO epitaxial growth, the densification and shrinkage of the film occurs. The YBCO films are epitaxially grown with remaining the unreacted phase particles in the film, subsequently pores are generated again by a reaction of these unreacted particles to form YBCO accompanying with the volume reduction. In conclusion, it is important to control the densification of precursor films and the coarsening of the unreacted phase particles in the crystallization process, in order to fabricate YBCO final films with fine crystallinity and high IC values.

本文言語英語
ページ(範囲)1017-1023
ページ数7
ジャーナルPhysica C: Superconductivity and its applications
468
14
DOI
出版ステータス出版済み - 7 15 2008
外部発表はい

All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • エネルギー工学および電力技術
  • 電子工学および電気工学

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