A new method is proposed to analyze the mode content of high power electromagnetic waves that are propagating through corrugated waveguides in the electron cyclotron resonance heating (ECH) systems for nuclear fusion devices. The method was applied to the 168GHz transmission line of the ECH system in the Large Helical Device (LHD) to evaluate the waveguide alignment. The mode content of the propagating waves could be accurately analyzed using this method. Furthermore, the wave field in the waveguide was reconstructed using the mode content information obtained for each mode.
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