Modeling of the 3D unsteady melt flow in an industrial-scale Cz-Si crystal growth using LES method

Xin Liu, Lijun Liu, Yuan Wang, Koichi Kakimoto

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

A computational model was presented for the 3D unsteady turbulent melt flow in an industrial-scale Cz-Si growth with Large Eddy Simulation (LES) method in curvilinear grids. The turbulent transport of momentum and heat in the melt was investigated. The turbulent nature of unsteadiness and three-dimensionality of the melt flow was verified. Fluctuation of the thermal field was obviously observed in the melt region close to the melt-crystal interface.

本文言語英語
ホスト出版物のタイトルChina Semiconductor Technology International Conference 2010, CSTIC 2010
ページ1035-1039
ページ数5
1
DOI
出版ステータス出版済み - 2010
イベントChina Semiconductor Technology International Conference 2010, CSTIC 2010 - Shanghai, 中国
継続期間: 3 18 20103 19 2010

出版物シリーズ

名前ECS Transactions
番号1
27
ISSN(印刷版)1938-5862
ISSN(電子版)1938-6737

その他

その他China Semiconductor Technology International Conference 2010, CSTIC 2010
国/地域中国
CityShanghai
Period3/18/103/19/10

All Science Journal Classification (ASJC) codes

  • 工学(全般)

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