Molecular-dynamics simulations of recrystallization processes in silicon: Nucleation and crystal growth in the solid-phase and melt

T. Motooka, Shinji Munetoh, R. Kishikawa, T. Kuranaga, T. Ogata, T. Mitani

研究成果: ジャーナルへの寄稿記事

抄録

It is of increasing importance to understand crystallization processes of silicon (Si) in atomic scale for developing high-speed thin film transistors. We have performed molecular-dynamics (MD) simulations of nucleation, crystallization and defect formation processes in amorphous Si (a-Si) as well as in liquid Si (1-Si). Based on the MD simulation results combined with high-resolution electron microscopy measurements, it is proposed that the crystallization and defect formation processes are controlled by the interface nanostructures between disordered and crystalline Si. It is also suggested that nucleation and crystal growth in a-Si films deposited on glass during excimer laser annealing occur in amorphous-solid and low-density liquid phases rather than in supercooled 1-Si as has been generally accepted. copyright The Electrochemical Society.

元の言語英語
ページ(範囲)207-213
ページ数7
ジャーナルUnknown Journal
3
発行部数8
DOI
出版物ステータス出版済み - 2006

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Crystal growth
nucleation
silicon
Molecular dynamics
Nucleation
melt
crystal
Silicon
Computer simulation
Crystallization
simulation
crystallization
defect
Glass lasers
Defects
High resolution electron microscopy
Liquids
Excimer lasers
Thin film transistors
liquid

All Science Journal Classification (ASJC) codes

  • Engineering(all)

これを引用

Molecular-dynamics simulations of recrystallization processes in silicon : Nucleation and crystal growth in the solid-phase and melt. / Motooka, T.; Munetoh, Shinji; Kishikawa, R.; Kuranaga, T.; Ogata, T.; Mitani, T.

:: Unknown Journal, 巻 3, 番号 8, 2006, p. 207-213.

研究成果: ジャーナルへの寄稿記事

Motooka, T. ; Munetoh, Shinji ; Kishikawa, R. ; Kuranaga, T. ; Ogata, T. ; Mitani, T. / Molecular-dynamics simulations of recrystallization processes in silicon : Nucleation and crystal growth in the solid-phase and melt. :: Unknown Journal. 2006 ; 巻 3, 番号 8. pp. 207-213.
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AU - Mitani, T.

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