Molecular dynamics study of velocity distribution and local temperature change during rapid cooling processes in excimer-laser annealed silicon

Byoung Min Lee, Shinji Munetoh, Teruaki Motooka

研究成果: ジャーナルへの寄稿記事

14 引用 (Scopus)

抄録

Molecular dynamics (MD) simulations have been performed to investigate velocity distribution of atoms and local temperature changes during rapid cooling processes in excimer-laser annealed Si. The interatomic forces were calculated using the Tersoff potential, and the rapid cooling processes were simulated by determining the atomic movements with a combination of Langevin and Newton equations using a MD cell with the size of 48.9 × 48.9 × 97.8 Å3. The local velocity distribution during rapid cooling processes was found to be the Maxwell-Boltzmann type, and the steady-state temperature distribution was obtained within 100 ps.

元の言語英語
ページ(範囲)198-202
ページ数5
ジャーナルComputational Materials Science
37
発行部数3
DOI
出版物ステータス出版済み - 9 1 2006

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Excimer Laser
Excimer lasers
Silicon
Velocity Distribution
Velocity distribution
Molecular Dynamics
excimer lasers
Molecular dynamics
Cooling
velocity distribution
molecular dynamics
cooling
silicon
interatomic forces
Steady-state Distribution
Temperature Distribution
Ludwig Boltzmann
Temperature
newton
Molecular Dynamics Simulation

All Science Journal Classification (ASJC) codes

  • Computer Science(all)
  • Chemistry(all)
  • Materials Science(all)
  • Mechanics of Materials
  • Physics and Astronomy(all)
  • Computational Mathematics

これを引用

Molecular dynamics study of velocity distribution and local temperature change during rapid cooling processes in excimer-laser annealed silicon. / Lee, Byoung Min; Munetoh, Shinji; Motooka, Teruaki.

:: Computational Materials Science, 巻 37, 番号 3, 01.09.2006, p. 198-202.

研究成果: ジャーナルへの寄稿記事

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AB - Molecular dynamics (MD) simulations have been performed to investigate velocity distribution of atoms and local temperature changes during rapid cooling processes in excimer-laser annealed Si. The interatomic forces were calculated using the Tersoff potential, and the rapid cooling processes were simulated by determining the atomic movements with a combination of Langevin and Newton equations using a MD cell with the size of 48.9 × 48.9 × 97.8 Å3. The local velocity distribution during rapid cooling processes was found to be the Maxwell-Boltzmann type, and the steady-state temperature distribution was obtained within 100 ps.

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