Multifunctional TEM-specimen holder equipped with a piezodriving probe and an electron irradiation port

Daisuke Shindo, Satoshi Suzuki, Kuniaki Sato, Zentaro Akase, Yasukazu Murakami, Kazuya Yamazaki, Yuuta Ikeda, Tomohisa Fukuda

研究成果: ジャーナルへの寄稿学術誌査読

抄録

The charging effect due to electron irradiation in an electron microscope has been studied so far with incident electrons. Here we report on a new specimen holder to control the charging effect by using electrons emitted from an irradiation port in the holder while maintaining a constant intensity of the incident electron beam. Details of the charging effect, such as electric field variation, are expected to be investigated by electron holography. The new specimen holder was developed by modifying a double-probe piezodriving specimen holder to introduce an electron irradiation port in one of its two arms. As a result, the new modified specimen holder consists of a piezodriving probe and an electron irradiation port, both of which can be controlled in three dimensions, using piezoelectric elements and micrometers. We demonstrate that variations in the charging effect for epoxy resin and surface contamination can be observed by electron holography.

本文言語英語
ページ(範囲)487-490
ページ数4
ジャーナルJournal of Electron Microscopy
62
4
DOI
出版ステータス出版済み - 8月 2013
外部発表はい

!!!All Science Journal Classification (ASJC) codes

  • 器械工学

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