Nano-dimensional measurement using optically trapped probe enhanced by interferometric scale

Masaki Michihata, Daisuke Nakai, Terutake Hayashi, Yasuhiro Takaya

研究成果: 書籍/レポート タイプへの寄稿会議への寄与

3 被引用数 (Scopus)

抄録

We propose a new dimensional measurement technique that is capable of measuring the bottom surface of a stepwise shape. The measurement system is composed of a length scale and a sensor probe to read the scale. The probe is trapped and controlled three-dimensionally by laser trapping technique. The scale is arisen by optical interference, which is extended straight to the measured surface from the probe. Firstly measurement principle is theoretically explained. Remarkable feature of this technique is feasibility to access the area as narrow as 15 μm. Vertical resolution of this measurement technique is experimentally estimated as 10 nm. The measurable range of the inclination angle of surface is less than 15°. In terms of the measurement accuracy, it is evaluated around 100 nm.

本文言語英語
ホスト出版物のタイトル19th IMEKO World Congress 2009
ページ2163-2168
ページ数6
出版ステータス出版済み - 12月 1 2009
外部発表はい
イベント19th IMEKO World Congress 2009 - Lisbon, ポルトガル
継続期間: 9月 6 20099月 11 2009

出版物シリーズ

名前19th IMEKO World Congress 2009
4

その他

その他19th IMEKO World Congress 2009
国/地域ポルトガル
CityLisbon
Period9/6/099/11/09

!!!All Science Journal Classification (ASJC) codes

  • 電子工学および電気工学

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