@inproceedings{6403a1845cef4801823e45c4d0331aba,
title = "Nano-finishing using a micro-particle controlled by optical radiation force",
author = "Kenshiro Hida and Takashi Miyoshi and Yasuhiro Takaya and Terutake Hayashi",
year = "2005",
language = "English",
isbn = "1887706399",
series = "Proceedings of the 20th Annual ASPE Meeting, ASPE 2005",
booktitle = "Proceedings of the 20th Annual ASPE Meeting, ASPE 2005",
note = "20th Annual Meeting of the American Society for Precision Engineering, ASPE 2005 ; Conference date: 09-10-2005 Through 14-10-2005",
}