Nanoblock Assembly Using Pulse RF Discharges with Amplitude Modulation

Shinya Iwashita, Hiroshi Miyata, Kazunori Koga, Masaharu Shiratani

研究成果: Chapter in Book/Report/Conference proceeding › Chapter

本文言語	英語
ホスト出版物のタイトル	Industrial Plasma Technology
ホスト出版物のサブタイトル	Applications from Environmental to Energy Technologies
出版社	Wiley-VCH
ページ	377-383
ページ数	7
ISBN（印刷版）	9783527325443
DOI	https://doi.org/10.1002/9783527629749.ch31
出版ステータス	出版済み - 10 7 2010

All Science Journal Classification (ASJC) codes

@inbook{497ff1a3c75143499fe5eb2158fff9bc,

title = "Nanoblock Assembly Using Pulse RF Discharges with Amplitude Modulation",

author = "Shinya Iwashita and Hiroshi Miyata and Kazunori Koga and Masaharu Shiratani",

year = "2010",

month = oct,

day = "7",

doi = "10.1002/9783527629749.ch31",

language = "English",

isbn = "9783527325443",

pages = "377--383",

booktitle = "Industrial Plasma Technology",

publisher = "Wiley-VCH",

}

TY - CHAP

T1 - Nanoblock Assembly Using Pulse RF Discharges with Amplitude Modulation

AU - Iwashita, Shinya

AU - Miyata, Hiroshi

AU - Koga, Kazunori

AU - Shiratani, Masaharu

PY - 2010/10/7

Y1 - 2010/10/7

UR - http://www.scopus.com/inward/record.url?scp=84885978241&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84885978241&partnerID=8YFLogxK

U2 - 10.1002/9783527629749.ch31

DO - 10.1002/9783527629749.ch31

M3 - Chapter

AN - SCOPUS:84885978241

SN - 9783527325443

SP - 377

EP - 383

BT - Industrial Plasma Technology

PB - Wiley-VCH

ER -