Nanoimprint technology for application to photonic devices

Masashi Nakao, Shiyoshi Yokoyama, Hideki Masuda

研究成果: ジャーナルへの寄稿Conference article

抄録

We have developed nanoimprint technology to fabricate functional optical components. The future and usage of various molds for nanoimprint are described and their patterning examples are shown. Several applications of the nanoimprint technology are introduced; anti-reflection surface structure by using graded convex and concave patterns, extremely low threshold dye laser by 2-dimensional photonic crystals infiltrated with a gain medium, and various semiconductor nanostructures being used for functional optical devices. Nanoimprint is key technology to realize these components.

元の言語英語
記事番号605001
ジャーナルProceedings of SPIE - The International Society for Optical Engineering
6050
DOI
出版物ステータス出版済み - 12 1 2005
外部発表Yes
イベントOptomechatronic Micro/Nano Devices and Components - Sappora, 日本
継続期間: 12 5 200512 7 2005

Fingerprint

Nanoimprint
Photonic devices
Photonics
photonics
dye lasers
Dye lasers
Molds
Optical devices
Photonic crystals
Surface structure
thresholds
Optical Devices
Nanostructures
Patterning
Dyes
Photonic Crystal
Semiconductor materials
crystals
Semiconductors
Laser

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

これを引用

Nanoimprint technology for application to photonic devices. / Nakao, Masashi; Yokoyama, Shiyoshi; Masuda, Hideki.

:: Proceedings of SPIE - The International Society for Optical Engineering, 巻 6050, 605001, 01.12.2005.

研究成果: ジャーナルへの寄稿Conference article

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