Nanoimprint technology for application to photonic devices

Masashi Nakao, Shiyoshi Yokoyama, Hideki Masuda

研究成果: Contribution to journalConference article査読

抄録

We have developed nanoimprint technology to fabricate functional optical components. The future and usage of various molds for nanoimprint are described and their patterning examples are shown. Several applications of the nanoimprint technology are introduced; anti-reflection surface structure by using graded convex and concave patterns, extremely low threshold dye laser by 2-dimensional photonic crystals infiltrated with a gain medium, and various semiconductor nanostructures being used for functional optical devices. Nanoimprint is key technology to realize these components.

本文言語英語
論文番号605001
ジャーナルProceedings of SPIE - The International Society for Optical Engineering
6050
DOI
出版ステータス出版済み - 12 1 2005
外部発表はい
イベントOptomechatronic Micro/Nano Devices and Components - Sappora, 日本
継続期間: 12 5 200512 7 2005

All Science Journal Classification (ASJC) codes

  • 電子材料、光学材料、および磁性材料
  • 凝縮系物理学
  • コンピュータ サイエンスの応用
  • 応用数学
  • 電子工学および電気工学

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