Nanoscale and femtogram trace element analysis using soft laser ablation fluorescence spectroscopy

Yuji Oki, Takayuki Takao, Takashi Higotani, Daisuke Nakamura, Mitsuo Maeda

研究成果: ジャーナルへの寄稿Conference article

抄録

A solid-state surface analysis of trace element was demonstrated with nanometer depth resolution and femtogram detection sensitivity. An LIF spectroscopy was combined with an excimer laser ablation, and the depth resolution of 3.6nm was obtained.

元の言語英語
ページ(範囲)1854-1855
ページ数2
ジャーナルOSA Trends in Optics and Photonics Series
88
出版物ステータス出版済み - 1 1 2003
イベントConference on Lasers and Electro-Optics (CLEO); Postconference Digest - Baltimore, MD, 米国
継続期間: 6 1 20036 6 2003

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fluorescence spectroscopy
Surface analysis
Fluorescence spectroscopy
Excimer lasers
Laser ablation
Trace elements
ablation
laser
trace element
Spectroscopy
spectroscopy
analysis
detection
solid state

All Science Journal Classification (ASJC) codes

  • Engineering(all)

これを引用

Nanoscale and femtogram trace element analysis using soft laser ablation fluorescence spectroscopy. / Oki, Yuji; Takao, Takayuki; Higotani, Takashi; Nakamura, Daisuke; Maeda, Mitsuo.

:: OSA Trends in Optics and Photonics Series, 巻 88, 01.01.2003, p. 1854-1855.

研究成果: ジャーナルへの寄稿Conference article

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abstract = "A solid-state surface analysis of trace element was demonstrated with nanometer depth resolution and femtogram detection sensitivity. An LIF spectroscopy was combined with an excimer laser ablation, and the depth resolution of 3.6nm was obtained.",
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AU - Takao, Takayuki

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AU - Maeda, Mitsuo

PY - 2003/1/1

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JO - OSA Trends in Optics and Photonics Series

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