NASICON thick film-based CO2 sensor prepared by a sol-gel method

Tetsuya Kida, Yuji Miyachi, Kengo Shimanoe, Noboru Yamazoe

研究成果: ジャーナルへの寄稿記事

67 引用 (Scopus)

抄録

Thick films of NASICON (Na+ conductor, Na3Zr2Si2PO12) were prepared for the fabrication of a planar CO2 sensor. The powder of a precursor of NASICON, derived through a sol-gel process, was screen-printed on an alumina substrate and converted into a NASICON thick film by calcination. The formation of crystalline NASICON was almost complete after calcination at 900 and 1000°C, but the films remained rather poor in densification. On the other hand, the films were densified after calcination at 1100°C or above, but NASICON phase disappeared by decomposition. The planar CO2 sensor device was thus fabricated by using the NASICON thick film (30μm thick) calcined at 1000°C. The device attached with a binary carbonate auxiliary phase (Li2CO3-BaCO3) showed fairly good CO2 sensing properties at 450-600°C, despite rather poor densification of the thick film used.

元の言語英語
ページ(範囲)28-32
ページ数5
ジャーナルSensors and Actuators, B: Chemical
80
発行部数1
DOI
出版物ステータス出版済み - 11 1 2001

Fingerprint

Thick films
Sol-gel process
thick films
gels
Calcination
roasting
sensors
Sensors
densification
Densification
Aluminum Oxide
Carbonates
sol-gel processes
Powders
carbonates
Alumina
conductors
aluminum oxides
Crystalline materials
Decomposition

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

これを引用

NASICON thick film-based CO2 sensor prepared by a sol-gel method. / Kida, Tetsuya; Miyachi, Yuji; Shimanoe, Kengo; Yamazoe, Noboru.

:: Sensors and Actuators, B: Chemical, 巻 80, 番号 1, 01.11.2001, p. 28-32.

研究成果: ジャーナルへの寄稿記事

Kida, Tetsuya ; Miyachi, Yuji ; Shimanoe, Kengo ; Yamazoe, Noboru. / NASICON thick film-based CO2 sensor prepared by a sol-gel method. :: Sensors and Actuators, B: Chemical. 2001 ; 巻 80, 番号 1. pp. 28-32.
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