Near-net shaping of single-crystal silicon for optical lens by one-shot pressing at temperature just below silicon melting point and its demonstration of optical properties

Kohei Morishita, Kazuo Nakajima, Takashi Fujii, Masakazu Shiinoki

研究成果: Contribution to journalArticle査読

6 被引用数 (Scopus)

抄録

Silicon is brittle and easily cracks even under a small load. The difficulty in shaping silicon has prevented breakthroughs in the mass production of silicon lenses for terahertz and infrared technology. We developed a novel method of deforming bulk single-crystal silicon into the required shape by one-shot pressing and realized the near-net shaping of silicon into a plano-convex shape with the curvature radius R = 7:5 mm. The crystallographic quality of the obtained lens was improved by primary recrystallization. By packaging it into a practical sensor module, the suitability of the lens for practical application was demonstrated.

本文言語英語
論文番号106501
ジャーナルApplied Physics Express
4
10
DOI
出版ステータス出版済み - 10 2011
外部発表はい

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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