TY - GEN
T1 - Necessity of epitaxial growth of β-FeSi2 Thin Films in Formation of n-Type β-FeSi2/p-Type Si Heterojunction Photodiodes
AU - Iwasaki, R.
AU - Promros, N.
AU - Yamashita, K.
AU - Izumi, S.
AU - Funasaki, S.
AU - Shaban, M.
AU - Yoshitake, T.
PY - 2013
Y1 - 2013
N2 - n-Type β-FeSi2 thin films were epitaxially and non-epitaxially grown on p-type Si(111) substrates by facing-targets direct-current sputtering (FTDCS) at a substrate temperature of 600°C. Whereas the n-type epitaxial β-FeSi2/p-type Si heterojunctions exhibited a typical rectifying behavior with a rectification ratio of more than two orders of magnitude at bias voltages between ±1 V, the heterojunctions comprising non-epitaxial β-FeSi2 films rarely exhibited rectifying action. The epitaxial growth of β-FeSi2 is an significant factor for forming the heterojunction diodes.
AB - n-Type β-FeSi2 thin films were epitaxially and non-epitaxially grown on p-type Si(111) substrates by facing-targets direct-current sputtering (FTDCS) at a substrate temperature of 600°C. Whereas the n-type epitaxial β-FeSi2/p-type Si heterojunctions exhibited a typical rectifying behavior with a rectification ratio of more than two orders of magnitude at bias voltages between ±1 V, the heterojunctions comprising non-epitaxial β-FeSi2 films rarely exhibited rectifying action. The epitaxial growth of β-FeSi2 is an significant factor for forming the heterojunction diodes.
UR - http://www.scopus.com/inward/record.url?scp=84885746348&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84885746348&partnerID=8YFLogxK
U2 - 10.1149/05006.0157ecst
DO - 10.1149/05006.0157ecst
M3 - Conference contribution
AN - SCOPUS:84885746348
SN - 9781607683544
T3 - ECS Transactions
SP - 157
EP - 162
BT - Low-Dimensional Nanoscale Electronic and Low-Dimensional Nanoscale Electronic and on Compound Semiconductors 54, SOTAPOCS 2012
PB - Electrochemical Society Inc.
T2 - Symposia on Low-Dimensional Nanoscale Electronic and Photonic Devices 5 and State-of-the-Art Program on Compound Semiconductors 2012, SOTAPOCS 54 - 222nd ECS Meeting/PRiME 2012
Y2 - 7 October 2012 through 12 October 2012
ER -