New microwave launcher for producing ecr plasmas without window contamination i. Excitation of electron cyclotron wave

Masayoshi Tanaka, Makoto Tamaoki, Seiichiro Higashi, Morito Matsuoka, Akio Komori, Yoshinobu Kawai

    研究成果: ジャーナルへの寄稿記事

    4 引用 (Scopus)

    抜粋

    A new microwave launcher with a reflector plate is experimentally examined. The reflector plate covers the microwave window and prevents particles from depositing onto the window surface. Two types of launchers are tested in terms of achieved density, excited wave mode and microwave reflection. It is found that the Type-II launcher is capable of exciting an electron cyclotron wave and produces dense plasmas of 1012 cm-3 density.

    元の言語英語
    ページ(範囲)1818-1821
    ページ数4
    ジャーナルJapanese Journal of Applied Physics
    32
    発行部数4 R
    DOI
    出版物ステータス出版済み - 4 1993

      フィンガープリント

    All Science Journal Classification (ASJC) codes

    • Engineering(all)
    • Physics and Astronomy(all)

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