New perspectives of gas sensor technology

Noboru Yamazoe, Kengo Shimanoe

研究成果: ジャーナルへの寄稿記事

239 引用 (Scopus)

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Two recent topics important for advancing gas sensor technology are introduced. Semiconductor gas sensors have been developed so far on empirical bases but now a fundamental theory has been made available for further developments. The theory reveals the roles of physical properties of semiconductors and chemical properties of gases in the receptor function. MEMS techniques have been applied to fabrication of micro-platforms for use in gas sensors. The micro-platforms appear to provide gas sensors with new innovative function.

元の言語英語
ページ(範囲)100-107
ページ数8
ジャーナルSensors and Actuators, B: Chemical
138
発行部数1
DOI
出版物ステータス出版済み - 4 24 2009

    フィンガープリント

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering
  • Materials Chemistry

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