New planar lightwave circuit (PLC) platform eliminating Si terraces and its application to opto-electronic hybrid integrated modules

Takashi Yamada; Toshikazu Hashimoto; Takaharu Ohyama; Yuji Akahori; Akimasa Kaneko; Kazutoshi Kato; Ryouichi Kasahara; Mikitaka Ito

New planar lightwave circuit (PLC) platform eliminating Si terraces and its application to opto-electronic hybrid integrated modules

Takashi Yamada, Toshikazu Hashimoto, Takaharu Ohyama, Yuji Akahori, Akimasa Kaneko, Kazutoshi Kato, Ryouichi Kasahara, Mikitaka Ito

研究成果: ジャーナルへの寄稿 › 学術誌 › 査読

11 被引用数 (Scopus)

抄録

We have developed a new planar lightwave circuit (PLC) platform eliminating Si terraces for hybrid integrated optical modules. This PLC platform has the advantage of a lower fabrication cost than the conventional PLC platform with an Si terrace, because it does not require fabrication processes such as Si terrace forming and mechanical polishing. Using our new PLC platform structure, we fabricated a transceiver for optical access networks and an 8-channel multichannel photoreceiver for wavelength division multiplexing (WDM) interconnection systems.

本文言語	英語
ページ（範囲）	685-692
ページ数	8
ジャーナル	IEICE Transactions on Electronics
巻	E84-C
号	5
出版ステータス	出版済み - 1月 1 2001
外部発表	はい

!!!All Science Journal Classification (ASJC) codes

電子材料、光学材料、および磁性材料
電子工学および電気工学

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引用スタイル

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AU - Yamada, Takashi

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AU - Akahori, Yuji

AU - Kaneko, Akimasa

AU - Kato, Kazutoshi

AU - Kasahara, Ryouichi

AU - Ito, Mikitaka

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