Noncontact nanometric positioning of probe tip for continuous stiffness measurement system

S. Sakuma, F. Arai

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

This paper presents noncontact nanometric positioning of on-chip probe. In order to obtain nanometric order resolution, we proposed the reduction mechanism. We succeeded in nanometric order non-contact actuation of on-chip probe by using reduction mechanism. This mechanism utilizes magnetic force and the difference of stiffness of the beam and center structure. The on-chip probe features are 1.possible to operate in a flow environment in a biochip, 2.accurate positioning with high resolution, 3.parallel plate mechanisms for stable operation and 4.reduction rate depends on only the rate of stiffness. In this paper we developed on-chip nanometric probe with reduction mechanism. The performance of the probe was examined. We succeeded in nanometric order non-contact actuation of on-chip probe.

本文言語英語
ホスト出版物のタイトル2011 Int. Symp. on Micro-NanoMechatronics and Human Science, Symp. on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "Hyper Bio Assembler for 3D Cellular System Innovation"
出版社IEEE Computer Society
ページ60-62
ページ数3
ISBN(印刷版)9781457713613
DOI
出版ステータス出版済み - 2011
外部発表はい
イベント22nd Annual Symp. on Micro-Nano Mechatronics and Human Science, MHS 2011, Held Jointly with the Symp. on COE for Education and Research of Micro-Nano Mechatronics, Micro-Nano GCOE 2011, Symp. on Hyper Bio Assembler for 3D Cellular System Innovation - Nagoya, 日本
継続期間: 11 6 201111 9 2011

出版物シリーズ

名前2011 Int. Symp. on Micro-NanoMechatronics and Human Science, Symp. on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "Hyper Bio Assembler for 3D Cellular System Innovation"

その他

その他22nd Annual Symp. on Micro-Nano Mechatronics and Human Science, MHS 2011, Held Jointly with the Symp. on COE for Education and Research of Micro-Nano Mechatronics, Micro-Nano GCOE 2011, Symp. on Hyper Bio Assembler for 3D Cellular System Innovation
Country日本
CityNagoya
Period11/6/1111/9/11

All Science Journal Classification (ASJC) codes

  • Artificial Intelligence
  • Mechanical Engineering

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