TY - GEN
T1 - Noncontact nanometric positioning of probe tip for continuous stiffness measurement system
AU - Sakuma, S.
AU - Arai, F.
N1 - Copyright:
Copyright 2020 Elsevier B.V., All rights reserved.
PY - 2011
Y1 - 2011
N2 - This paper presents noncontact nanometric positioning of on-chip probe. In order to obtain nanometric order resolution, we proposed the reduction mechanism. We succeeded in nanometric order non-contact actuation of on-chip probe by using reduction mechanism. This mechanism utilizes magnetic force and the difference of stiffness of the beam and center structure. The on-chip probe features are 1.possible to operate in a flow environment in a biochip, 2.accurate positioning with high resolution, 3.parallel plate mechanisms for stable operation and 4.reduction rate depends on only the rate of stiffness. In this paper we developed on-chip nanometric probe with reduction mechanism. The performance of the probe was examined. We succeeded in nanometric order non-contact actuation of on-chip probe.
AB - This paper presents noncontact nanometric positioning of on-chip probe. In order to obtain nanometric order resolution, we proposed the reduction mechanism. We succeeded in nanometric order non-contact actuation of on-chip probe by using reduction mechanism. This mechanism utilizes magnetic force and the difference of stiffness of the beam and center structure. The on-chip probe features are 1.possible to operate in a flow environment in a biochip, 2.accurate positioning with high resolution, 3.parallel plate mechanisms for stable operation and 4.reduction rate depends on only the rate of stiffness. In this paper we developed on-chip nanometric probe with reduction mechanism. The performance of the probe was examined. We succeeded in nanometric order non-contact actuation of on-chip probe.
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U2 - 10.1109/MHS.2011.6102159
DO - 10.1109/MHS.2011.6102159
M3 - Conference contribution
AN - SCOPUS:84863319260
SN - 9781457713613
T3 - 2011 Int. Symp. on Micro-NanoMechatronics and Human Science, Symp. on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "Hyper Bio Assembler for 3D Cellular System Innovation"
SP - 60
EP - 62
BT - 2011 Int. Symp. on Micro-NanoMechatronics and Human Science, Symp. on "COE for Education and Research of Micro-Nano Mechatronics", Symposium on "Hyper Bio Assembler for 3D Cellular System Innovation"
PB - IEEE Computer Society
T2 - 22nd Annual Symp. on Micro-Nano Mechatronics and Human Science, MHS 2011, Held Jointly with the Symp. on COE for Education and Research of Micro-Nano Mechatronics, Micro-Nano GCOE 2011, Symp. on Hyper Bio Assembler for 3D Cellular System Innovation
Y2 - 6 November 2011 through 9 November 2011
ER -