Novel fabrication method for transparent conducting oxide films utilizing solid-phase crystallized seed layers

Naho Itagaki, Kazunari Kuwahara, Kenta Nakahara

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

High quality ZnO:Al (AZO) films have been obtained by our novel fabrication method utilizing solid-phase crystallized (SPC) seed layers. The crystal grain size of AZO films with seed layers is 5 times larger than that of conventional films, which is due to the low nuclei density of seed layers. As a result, the resistivity of AZO films of 18 nm in total film thickness is drastically reduced from 40×10-4Ωcm for the conventional films to 5×10-4Ωcm for our films. No differences in transparency hve been observed between AZO films with and without seed layers and their optical transmittance is higher than 80% in a wide wavelength range of 400-2500 nm. These results reveal that our method is very promising for fabrication of transparent conducting oxide films. Our method opens up a new avenue for oxide fabrications of nm thick films with excellent crystallinity, because it can be easily extended to other oxides whose amorphous phase is difficult to obtain.

本文言語英語
ホスト出版物のタイトルInternational Conference on Advances in Condensed and Nano Materials, ICACNM-2011
ページ23-26
ページ数4
DOI
出版ステータス出版済み - 2011
イベントInternational Conference on Advances in Condensed and Nano Materials, ICACNM-2011 - Chandigarh, インド
継続期間: 2 23 20112 26 2011

出版物シリーズ

名前AIP Conference Proceedings
1393
ISSN(印刷版)0094-243X
ISSN(電子版)1551-7616

その他

その他International Conference on Advances in Condensed and Nano Materials, ICACNM-2011
Countryインド
CityChandigarh
Period2/23/112/26/11

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

フィンガープリント 「Novel fabrication method for transparent conducting oxide films utilizing solid-phase crystallized seed layers」の研究トピックを掘り下げます。これらがまとまってユニークなフィンガープリントを構成します。

引用スタイル