Novel ultra-lightweight and High-resolution MEMS X-ray optics for space astronomy

I. Mitsuishi, Y. Ezoe, K. Ishizu, T. Moriyama, M. Mita, N. Y. Yamasaki, K. Mitsuda, M. Horade, S. Sugiyama, R. Riveros, H. Yamaguchi, Y. Kanamori, K. Morishita, K. Nakajima, R. Maeda

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

5 被引用数 (Scopus)

抄録

We report a novel micromachined X-ray optics using DRIE formed micro mirrors for future space astronomical missions. We have fabricated a test optics and measured its imaging quality using X-rays. We have successfully verified the X-ray focusing using this type of optics for the first time in the world. The obtained angular resolution was about 20 arcmin and 3.1 mm. This result was consistent with the expected angular resolution based on the surface roughness of the DRIE formed side walls. To achieve a better angular resolution, we will condition annealing and magnetic field assisted finishing processes.

本文言語英語
ホスト出版物のタイトル2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
出版社IEEE Computer Society
ページ566-569
ページ数4
ISBN(印刷版)9781457701573
DOI
出版ステータス出版済み - 2011
外部発表はい

出版物シリーズ

名前2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

All Science Journal Classification (ASJC) codes

  • Hardware and Architecture
  • Electrical and Electronic Engineering

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