Numerical analysis of an electromagnetic CZ-SI growth process by 3D global modeling

Lijun Liu, Satoshi Nakano, Koichi Kakimoto

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

抄録

Three-dimensional (3D) thermal flow of silicon melt in an electromagnetic Czochralski (CZ) system was numerically investigated with a recently developed 3D global model. The electromagnetic CZ system was established with a transverse magnetic field and an injected electric current applied on the melt surface. Different azimuthal and radial positions of the electrode on the melt surface were taken into account to investigate their influences on the heat and mass transfer in the melt, as well as on the melt-crystal interface. The influence of the electric current direction on the melt flow pattern and temperature distribution was also demonstrated. The results showed that the position of the electrode on the melt surface and the direction of the applied electric current play an important role in controlling the heat and mass transfer in the silicon melt.

本文言語英語
ホスト出版物のタイトルProceedings of the ASME Summer Heat Transfer Conference, HT 2005
ページ229-235
ページ数7
DOI
出版ステータス出版済み - 12 1 2005
イベント2005 ASME Summer Heat Transfer Conference, HT 2005 - San Francisco, CA, 米国
継続期間: 7 17 20057 22 2005

出版物シリーズ

名前Proceedings of the ASME Summer Heat Transfer Conference
3

その他

その他2005 ASME Summer Heat Transfer Conference, HT 2005
国/地域米国
CitySan Francisco, CA
Period7/17/057/22/05

All Science Journal Classification (ASJC) codes

  • 工学(全般)

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