A numerical simulation was carried out on SiC-CVD in a horizontal hot-wall reactor. In order to explain the effect of surface polarity, Si-face and C-face, the surface reaction model was improved. Then, the growth processes and doping features of both Si-face and C-face were analyzed. The role of conditions at growing surface, such as surface mass flux of both Si-containing and C-containing species, surface concentration of Si-containing and C-containing species and their ratio, is investigated. Then, the deposition and etching rates, and doping concentration are analyzed as the function of those parameters. In addition, surface morphology of growing epitaxial layer is also investigated in connection with growing surface condition.
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