Numerical study of the effects of cusp-shaped magnetic fields and thermal conductivity on the melt-crystal interface in CZ crystal growth

Koichi Kakimoto, Lijun Liu

研究成果: Contribution to journalArticle査読

22 被引用数 (Scopus)

抄録

A numerical study was carried out to determine the effects of magnetic fields and thermal conductivity of a crystal on the melt flow in a crystal growth system. Comparisons of computations for the case of no magnetic field and for two types of cusp-shaped magnetic fields were made. The effect of thermal conductivity of a crystal on the shape of a melt-crystal interface was also investigated. The computation results showed that the magnetic fields have clear effects on both the pattern and strength of flow of the melt and the interface shape. Application of a magnetic field to the Czochralski system is therefore an effective tool for controlling the quality of bulk crystal during Czochralski growth process. The results also showed that the shape of the interface could be modified by changing thermal conductivity of silicon.

本文言語英語
ページ(範囲)716-725
ページ数10
ジャーナルCrystal Research and Technology
38
7-8
DOI
出版ステータス出版済み - 2003

All Science Journal Classification (ASJC) codes

  • 化学 (全般)
  • 材料科学(全般)
  • 凝縮系物理学

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