Off-axis sputter deposition of ZnO films on c-sapphire substrates with buffer layers prepared via nitrogen-mediated crystallization

N. Itagaki, K. Matsushima, D. Yamashita, H. Seo, K. Koga, M. Shiratani

研究成果: 著書/レポートタイプへの貢献会議での発言

1 引用 (Scopus)

抄録

High-quality epitaxial ZnO films on c-plane sapphire substrates have been obtained by utilizing off-axis sputtering configuration together with buffer layers prepared via nitrogen mediated crystallization (NMC). The role of NMC buffer layers is to provide high density of nucleation site and thus to reduce the strain energy caused by the large lattice mismatch (18%) between ZnO and sapphire. The NMC buffer layers allow two dimensional (2D) growth of subsequently grown ZnO films, being particularly enhanced by employing off-axis sputtering configuration, in which the substrate is positioned out of the high-energy particles such as negative oxygen ions originating from the targets. As a result, ZnO films with smooth surfaces (root-mean-square roughness: 0.76 nm) and high electron mobility of 88 cm2/Vsec are fabricated. Photoluminescence spectra of the ZnO films show strong near-band-edge emission, and the intensity of the orange-red defect emission significantly decreases with increasing the horizontal distance between the target and the substrate. From these results, we conclude that off-axis sputtering together with NMC buffer layers is a promising method for obtaining high quality epitaxial ZnO films.

元の言語英語
ホスト出版物のタイトルOxide-Based Materials and Devices V
出版者SPIE
ISBN(印刷物)9780819499004
DOI
出版物ステータス出版済み - 1 1 2014
イベント5th Annual Oxide Based Materials and Devices Conference - San Francisco, CA, 米国
継続期間: 2 2 20142 5 2014

出版物シリーズ

名前Proceedings of SPIE - The International Society for Optical Engineering
8987
ISSN(印刷物)0277-786X
ISSN(電子版)1996-756X

その他

その他5th Annual Oxide Based Materials and Devices Conference
米国
San Francisco, CA
期間2/2/142/5/14

Fingerprint

Sputter deposition
Aluminum Oxide
Sapphire
Buffer layers
Crystallization
Nitrogen
Buffer
sapphire
buffers
Substrate
crystallization
Sputtering
nitrogen
Epitaxial films
Substrates
sputtering
Lattice mismatch
Electron mobility
Strain energy
Photoluminescence

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

これを引用

Itagaki, N., Matsushima, K., Yamashita, D., Seo, H., Koga, K., & Shiratani, M. (2014). Off-axis sputter deposition of ZnO films on c-sapphire substrates with buffer layers prepared via nitrogen-mediated crystallization. : Oxide-Based Materials and Devices V [89871A] (Proceedings of SPIE - The International Society for Optical Engineering; 巻数 8987). SPIE. https://doi.org/10.1117/12.2041081

Off-axis sputter deposition of ZnO films on c-sapphire substrates with buffer layers prepared via nitrogen-mediated crystallization. / Itagaki, N.; Matsushima, K.; Yamashita, D.; Seo, H.; Koga, K.; Shiratani, M.

Oxide-Based Materials and Devices V. SPIE, 2014. 89871A (Proceedings of SPIE - The International Society for Optical Engineering; 巻 8987).

研究成果: 著書/レポートタイプへの貢献会議での発言

Itagaki, N, Matsushima, K, Yamashita, D, Seo, H, Koga, K & Shiratani, M 2014, Off-axis sputter deposition of ZnO films on c-sapphire substrates with buffer layers prepared via nitrogen-mediated crystallization. : Oxide-Based Materials and Devices V., 89871A, Proceedings of SPIE - The International Society for Optical Engineering, 巻. 8987, SPIE, 5th Annual Oxide Based Materials and Devices Conference, San Francisco, CA, 米国, 2/2/14. https://doi.org/10.1117/12.2041081
Itagaki N, Matsushima K, Yamashita D, Seo H, Koga K, Shiratani M. Off-axis sputter deposition of ZnO films on c-sapphire substrates with buffer layers prepared via nitrogen-mediated crystallization. : Oxide-Based Materials and Devices V. SPIE. 2014. 89871A. (Proceedings of SPIE - The International Society for Optical Engineering). https://doi.org/10.1117/12.2041081
Itagaki, N. ; Matsushima, K. ; Yamashita, D. ; Seo, H. ; Koga, K. ; Shiratani, M. / Off-axis sputter deposition of ZnO films on c-sapphire substrates with buffer layers prepared via nitrogen-mediated crystallization. Oxide-Based Materials and Devices V. SPIE, 2014. (Proceedings of SPIE - The International Society for Optical Engineering).
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