Ohmic contact for silicon carbide by carbon nanotubes

Masafumi Inaba, Kazuma Suzuki, Yu Hirano, Wataru Norimatsu, Michiko Kusunoki, Hiroshi Kawarada

研究成果: Chapter in Book/Report/Conference proceedingConference contribution

1 被引用数 (Scopus)

抄録

The electrical contact properties of silicon carbide (SiC) and carbon nanotubes (CNTs) were measured by conductive atomic force microscopy (C-AFM). A CNT forest was synthesized by SiC surface decomposition. Trenches, which electrically separate the conduction area, were fabricated using a focused ion beam (FIB) without a cover layer, and the resistance of each island was measured by C-AFM. From the dependence of the resistance on the CNT forest island size, the contact resistance between the CNTs and the SiC substrate was measured. By varying the dopant density in the SiC substrate, the Schottky barrier height was evaluated to be ~0.5 eV. This is slightly higher than a previously reported result obtained from a similar setup with a metal covering the CNT forest. We assumed that the damaged region existed in the islands, which is due to the trench formation by the FIB. The commensurate barrier height was obtained with the length of the damaged region assumed to be ~3 μm. Here, we could estimate the resistivity of a CNT/SiC interface without a cover layer. This indicates that a CNT forest on SiC is useful as a brief contact electrode.

本文言語英語
ホスト出版物のタイトルSilicon Carbide and Related Materials 2015
編集者Fabrizio Roccaforte, Filippo Giannazzo, Francesco La Via, Roberta Nipoti, Danilo Crippa, Mario Saggio
出版社Trans Tech Publications Ltd
ページ561-564
ページ数4
ISBN(印刷版)9783035710427
DOI
出版ステータス出版済み - 2016
外部発表はい
イベント16th International Conference on Silicon Carbide and Related Materials, ICSCRM 2015 - Sicily, イタリア
継続期間: 10 4 201510 9 2015

出版物シリーズ

名前Materials Science Forum
858
ISSN(印刷版)0255-5476
ISSN(電子版)1662-9752

その他

その他16th International Conference on Silicon Carbide and Related Materials, ICSCRM 2015
国/地域イタリア
CitySicily
Period10/4/1510/9/15

All Science Journal Classification (ASJC) codes

  • 材料科学(全般)
  • 凝縮系物理学
  • 材料力学
  • 機械工学

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